Apparatus for seperating dregs from wafer using centrifugal force

摘要

An apparatus for separating dregs mixed up with wafer pieces comprises: a separation bath, where the dregs and wafer pieces are accommodated and a cleaning solution is supplied until the dregs and and the wafer pieces are submerged; an agitator for stirring the cleaning solution in the separation bath; and a collecting device for collecting the dregs floating up as the cleaning solution moves according to the stirring of the agitator.