THICKNESS CHANGE MEASURING METHOD AND DEVICE OF PHOTOSENSITIVE LAYER USING CAPACITANCE MEASUREMENT

摘要

Purpose: a thickness measurement device of a photosensitive layer is arranged to prevent the coating defect of photosensitive layer by the measurement thickness change of the photosensitive layer in each position. Construction: a thickness measurement device of a photosensitive layer includes a first electrode, wherein according to one side, a second electrode, it is opposite with photosensitive layer and there is a distance to arrive first electrode, one is coupled to the first and second electrodes between the first and second electrodes, and one hydrometer power supply, installation is coated with the chip of a photosensitive layer.