DRIER OF WAFER

摘要

Purpose: a drying machine of chip is arranged to reduce IPA (IsoPropyl alcohol) gas in room in upper take, and includes many impurity dryings in wafer process and saves the time for changing IPA solution. Construction: a drying machine of chip includes: a process chamber (206), it is used for IPA (IsoPropyl alcohol) the first trap (208) and the second trap (214) for being applied to prevent IPA spray solutions: heating equipment (202) (204), for manufacturing IPA gases by heating IPA cooling worms (230) (232) (234), include the water for refrigerating IPA gases in the process chamber.