首页> 外国专利> METHOD FOR THE PURIFICATION OF HIGH PURITY ISOPROPYL ALCOHOL FOR CLEANING SEMICONDUCTOR

METHOD FOR THE PURIFICATION OF HIGH PURITY ISOPROPYL ALCOHOL FOR CLEANING SEMICONDUCTOR

机译:净化半导体的高纯度异丙基醇的纯化方法

摘要

The present invention relates to a kind of methods to be used for the clean ultra-pure isopropanol of semiconductor for purifying, it can manage inorganic impurity to purify in isopropanol purification process in a conventional isopropanol purification process, such as metal ion removes inorganic impurity, such as metal ion, so that last purified product can be cleaned by ultra-high purity isopropanol, it is used as a detergent of the semiconductor of 256 MB or more.
机译:本发明涉及一种用于半导体的清洁超纯异丙醇的纯化方法,可以在常规的异丙醇纯化工艺中通过异丙醇纯化工艺来管理无机杂质的纯化,例如金属离子去除无机杂质,例如金属离子,以便最后纯化的产物可以用超高纯度异丙醇清洗,它被用作256 MB或更大的半导体清洁剂。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号