SUPERHIGH-VACUUM TRANSPORT SYSTEM FOR PROBE SCANNING MICROSCOPES

摘要

FIELD: nanoprocessing equipment for transporting and setting probes and specimens in measurement and functional positions. SUBSTANCE: system that has linear rotary handler with grip joined with charging chamber, magazine for probe and specimen carriers with handler, linear locating handler with grip displacing over shaft, and metering chamber with finishing grip for probes and specimens is provided, in addition, with second linear rotary handler incorporating spring-loaded gripping fork one of whose shafts is specially shaped; grip of first linear rotary handler is cylindrical turning mechanism provided with pins; magazine for probe and specimen carriers is made in the form of rack and its handler is free to perform linear movement; linear locating handler can move in two additional relatively perpendicular directions in plane perpendicular to axial displacement and is provided with additional spring-loaded gripping fork with specially shaped shaft. EFFECT: enlarged functional capabilities, simplified design, improved reliability of system. 8 dwg