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Process for coating foil made of nickel or a nickel alloy and coated foil made of nickel or a nickel alloy

机译:涂覆镍或镍合金制成的箔的方法以及涂覆镍或镍合金制成的箔的方法

摘要

The invention discloses a method for coating foil comprised of nickel or a nickel alloy by sputtering a layer comprised of a metal compound on the foil in a vacuum. The foil is treated in an argon plasma with a pressure of 1031 3 to 10-2 millibar, for a variable time with a variable rate, and with energy of the plasma ions. A chromium oxide layer or a layer containing chromium oxide is successively sputtered by means of a reactive magnetron atomizing of at least one target comprised of chromium or an alloy containing chromium. The layer is sputtered with at least one atomization source in an argon-oxygen mixture with a pressure of 10-3 to 10-2 millibar. The operating point is constantly maintained in given boundaries and the foil is bonded in a defined thermal contact with a thermal buffer when the foil is being coated. The foil is coated until a given interference color pertaining to an interference of a first or second order is reached on the foil.
机译:本发明公开了通过在真空下在箔上溅射由金属化合物组成的层来涂覆由镍或镍合金制成的箔的方法。在氩气等离子体中以1031 3至10-2毫巴的压力,以可变速率和等离子体离子的能量将箔处理可变的时间。借助于对至少一个由铬或含铬的合金构成的靶的反应磁控管雾化,依次溅射氧化铬层或含氧化铬的层。用至少一种雾化源在氩气-氧气混合物中以10-3至10-2毫巴的压力溅射该层。在涂覆箔片时,将工作点始终保持在给定的边界内,并且将箔片与热缓冲剂进行固定的热接触。箔被涂覆直到在箔上达到与第一或第二级的干涉有关的给定干涉色为止。

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