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GUIDED ACOUSTIC WAVE DEVICE IN A THIN LAYER OF PIEZOELECTRIC MATERIAL ADHESED BY A MOLECULAR ADHESIVE ONTO A CARRIER SUBSTRATE AND MANUFACTURING METHOD
GUIDED ACOUSTIC WAVE DEVICE IN A THIN LAYER OF PIEZOELECTRIC MATERIAL ADHESED BY A MOLECULAR ADHESIVE ONTO A CARRIER SUBSTRATE AND MANUFACTURING METHOD
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机译:分子吸附到载体基质上的压电材料薄层中的导波装置及其制造方法
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摘要
The invention concerns a surface acoustic wave device comprising a fine piezoelectric material film, a molecular glue layer and a bearing substrate. The fine film constitutes a sound energy guide enabling to increase the performance levels of the device. The invention also concerns methods for making said sound wave device, comprising in particular a step which consists in molecular bonding between a bearing substrate and a piezoelectric substrate, then a step reducing the thickness of the piezoelectric substrate.
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