Device and method for surface acoustic waves guided in a thin layer of piezoelectric material bonded to a carrier substrate by a molecular binder

摘要

A surface acoustic wave device including a thin layer of piezoelectric material, a layer of molecular bonder, and a carrier substrate. The thin layer constitutes an acoustic energy guide that augments the performance characteristics of the device. A method for making the acoustic wave device includes a step of molecular bonding between a carrier substrate and a piezoelectric substrate, and then a step for reducing the thickness of the piezoelectric substrate.