Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources
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机译:用于激光等离子极紫外(EUV)光源的耐腐蚀喷嘴
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摘要
A gas nozzle having an increased resistance to erosion from energetic plasma particles generated by laser plasma sources. By reducing the area of the plasma-facing portion of the nozzle below a critical dimension and fabricating the nozzle from a material that has a high EUV transmission as well as a low sputtering coefficient such as Be, C, or Si, it has been shown that a significant reduction in reflectance loss of nearby optical components can be achieved even after exposing the nozzle to at least 10. sup.7 Xe plasma pulses.
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