首页>
外国专利>
Direct phase shift measurement between interference patterns using aerial image measurement tool
Direct phase shift measurement between interference patterns using aerial image measurement tool
展开▼
机译:使用航拍图像测量工具直接测量干涉图样之间的相移
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of measuring the phase shift between two regions of a phase shift mask. A workpiece is provided including a first pair of slits each having a substantially similar phase shift characteristic and a second pair of slits each having a different phase shift characteristic. Electromagnetic radiation is directed through the first pair of slits and the second pair of slits on the workpiece. A relative shift is measured between interference patterns caused by the first pair of slits and the second pair of slits.
展开▼