The scanning-type tunnel microscope which uses the cantilever die displacement component, and cantilever die probe, and this cantilever die probe which use this, information processing equipment

摘要

PURPOSE: To provide a cantilever displacement element of high repetitive durability by inclining the columnar structure of a piezoelectric body film comprising crystal grains in a direction of film thickness. ;CONSTITUTION: Lower and upper piezoelectric body films 3 and 5 have a crystal grain structure comprising an inclined grain system 8. For example, intermediate electrodes 4L and 4R are grounded and positive voltage is applied lower electrodes 2L and 2R, and upper electrodes 6L and 6R, a piezoelectric body 5 elongates in X and Y-axis directions, while a piezoelectric body 3 contracts. As a result, a cantilever section 9 is bent and displaced in a Z-axis direction. The intermediate electrode 4L is grounded and negative voltage is applied to the lower electrode 2L, while positive voltage is applied to the upper electrode 6L. The left portions of the piezoelectric bodies 3 and 5 are thereby caused to elongate. Also, voltage inverse to the left side is applied to the right lower electrode 2R and upper electrode 6R, thereby causing the contraction of the right half portions of the bodies 3 and 5. As a result, the cantilever section is bent and displaced in a Y-axis direction. For displacement in an X- direction, both right and left portions of the bodies 3 and 5 are concurrently caused to elongate. The film thickness-wise direction of the piezoelectric bodies 3 and 5, and the orientation of the crystal grains thereof are made to disagree, thereby enabling mechanical strength and durability to be increased.;COPYRIGHT: (C)1993,JPO&Japio