Collection inspection manner and collection survey instrument

摘要

PURPOSE: To avoid contamination of clean air and reduction of yield for manufacturing a semiconductor device, and lowering of its characteristics, etc., by inspecting the capturing efficiency of a fine particle-capturing body by using a fine particle with a substance having sublimation property. ;CONSTITUTION: First and second switching valves 19 and 20 are opened, a particle which is liberated from a plasma generation part 12 is supplied to a passage, and, at the same time, a low-temperature air is injected halfway to a chamber 14, thus enabling particles to be flocculated at the merging part of the low-temperature air. A third switching valve 21 is in blocked state at that time. In this state, air including fine particles is fed to a capturing body 13 to capture particles to be inspected which is laid out inside the chamber 14. The number of particles in air passing through the capturing body 13 is counted by a particle counter 22.;COPYRIGHT: (C)1994,JPO&Japio