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摘要

PURPOSE:To easily and inexpensively obtain a working mask by forming a master mask from a mother mask, and transferring and forming a pre- formatting pattern and a data bit pattern from the master mask. CONSTITUTION:A mother mask 2 having a pre-formatting pattern 14 is formed, a control signal is obtained from the pre-formatting pattern 14 on a master mask base material 20 where the pre-formatting pattern 14 has been transferred, a data bit pattern 32 is formed by means of laser irradiation, and a master mask 33 is formed. Further, the pre-formatting pattern 14 and the data bit pattern 32 are transferred from the master mask 33, and a working mask 5 is formed. Thus, the working mask can be easily and inexpensively formed.