Copper foil survey instrument, copper foil inspection manner, defective survey instrument, defective inspection manner

摘要

It irradiates light to the surface of the copper foil which can be begun to wind in guide idler 26, regular reflection light from the copper foil surface with CCD camera 14a, scattered light from the copper foil surface each absorbs light with CCD camera 14b, the light intensity of the regular reflection light which absorbs light 1st 2nd the brightness part above threshold exists inside the field above threshold, at the same time, judges that when the light intensity of the scattered light which absorbs light is smaller than brightness average, the particular field is the defective copper part.