The convergence ion beam device, and uses that the sample image method of presentation

摘要

PURPOSE:To store three-dimensional image data in memory and provide possibil ity of reproducing a section image by sensing charged particles sputtered from a specimen at the same time as processing of a certain desired part with a converging ion beam. CONSTITUTION:With a condenser lens 3 and an objective lens 6, an ion beam is converged on the surface of a specimen 7, and a deflecting electrode 5 deflects this ion beam to scan the specimen surface in the X- and Y-directions. In this maner the converging ion beam makes scanning in steps in the X-and Y- directions in certain periods, and all sensing signals are stored in a memory device 12 in correspondence to the scan to build the data of one picture field for the specimen surface. The sputtered amount of the specimen surface per scan is decided, and the image data of internal layers are stored with proceeding with the number of scanning passes. Thereby the section image of the desired inclined surface can be reproduced by setting the cross-section with a desired function in the X- and Y directions.