The manner which decreases the mixture metal ion in the photoresist constituent which contains the organicity polar solvent with ion exchange

摘要

(57) Abstract This invention offers the above-mentioned manner where the photoresist constituent contains the polar solvent in the manner which produces the photoresist constituent which only the mixture metal of level is contained very low making use of cation exchange resin and the anionic exchange resin which you cleaned. Using this kind of photoresist constituent, also the manner which produces the semiconductor device is offered.