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INDEX TYPE EDGE POLISHER

机译:指数式边缘抛光机

摘要

PROBLEM TO BE SOLVED: To provide an index type edge polisher formed such that the edge parts of both surfaces of the outer periphery of a circular workare continuously polished by a single polishing drum without reversing the surface and the back of the work and suspending a polishing work. ;SOLUTION: This edge polisher is formed such that four work holding means 3 are disposed at intervals of 90° on an index table 1 intermittently rotated in a 90° arc at a time around a first axis L1 and a polishing drum 4 inclining based on the first axis L1 is disposed at the central part of the index table 1, and the index table 1 is intermittently rotated in a 90° are at a time. This constitution polishes the edge of the outer periphery of the work W by moving each work holding means 3 from a handling position to feed and take out the work W, in order, to a first machining position H1 where an outer periphery edge E1 on the surface side is polished by the polishing drum 4, a second machining position where a peripheral side is polished, and a third machining position H3 where an outer pery edge on the back side is polished.;COPYRIGHT: (C)2001,JPO
机译:解决的问题:提供一种分度式边缘抛光机,其形成为使得圆形工件外周的两个表面的边缘部分由单个抛光鼓连续抛光,而无需反转工件的表面和背面并暂停抛光。工作。 ;解决方案:该边缘抛光机形成为使得四个工件保持装置3以90°的间隔布置。在分度台1上间歇地旋转90°。在分度台1的中央部配置有以第一轴L1为中心的圆弧状的圆弧,且以第一轴L1为基准倾斜的研磨鼓4配置在分度台1的中央,使分度台1间歇地旋转90度。一次。这种结构通过将每个工件保持装置3从处理位置移动以依次进给和取出工件W到第一加工位置H1来抛光工件W的外周边缘,在第一加工位置H1上,工件W的外周边缘E1被移出。表面侧由抛光鼓4抛光,第二个加工位置对周边进行抛光,第三个加工位置H3对背面的外边缘进行抛光。;版权所有:(C)2001,JPO

著录项

  • 公开/公告号JP2001062686A

    专利类型

  • 公开/公告日2001-03-13

    原文格式PDF

  • 申请/专利权人 SPEEDFAM CO LTD;

    申请/专利号JP19990238631

  • 申请日1999-08-25

  • 分类号B24B9/00;H01L21/304;

  • 国家 JP

  • 入库时间 2022-08-22 01:34:06

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