CMP ABRASIVE SLURRY-CONTAINING WASTE WATER TREATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a CMP abrasive slurry-containing waste water treating device capable of flocculating fine abrasive grain or the like contained in the CMP abrasive slurry-containing waste water discharged from a CMP process and solid/liquid separating to easily recover water containing no solid matter.;SOLUTION: The CMP abrasive slurry-containing waste water treating device has an oxidizing device for oxidizing the CMP abrasive slurry-containing waste water, a flocculation reaction device for performing the flocculation reaction by adding a flocculant to the oxidized waste water and a solid/liquid separation device for separating the solid matter in the waste water, to which the flocculation reaction is applied.;COPYRIGHT: (C)2001,JPO