APPARATUS FOR TREATING CMP SLURRY WASTE LIQUID AND METHOD OF TREATING CMP SLURRY WASTE LIQUID

摘要

PPROBLEM TO BE SOLVED: To provide an apparatus for treating CMP slurry waste liquid and a method of treating CMP slurry waste liquid which can be compactly configured and can clear the wastewater standard at a low cost. PSOLUTION: By using the apparatus 1 for treating CMP slurry waste liquid, a solid material-removing process for removing solid material with a special filter 2, a COD adsorption process for adsorbing and removing a surfactant and organic material which raises COD with activated carbon, by using a COD adsorption tower 3 and a Cu ion-removing process for removing Cu ions by using a Cu-removing ion exchange resin tower 4 are continuously performed by means of a slurry waste liquid flow path 5. Therein, on the upper stream side than the Cu ion-removing process, the solid material-removing process and the COD adsorption process are performed and, thereby, only CMP slurry waste liquid is continuously and individually treated by the slurry waste liquid flow path 5. PCOPYRIGHT: (C)2011,JPO&INPIT