首页> 外国专利> AUTOMATIC DESIGN METHOD, MASK SET FOR EXPOSURE, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, PRODUCING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND RECORDING MEDIUM WITH RECORDED AUTOMATIC DESIGN PROGRAM

AUTOMATIC DESIGN METHOD, MASK SET FOR EXPOSURE, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, PRODUCING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND RECORDING MEDIUM WITH RECORDED AUTOMATIC DESIGN PROGRAM

机译:自动设计方法,曝光用掩模组,半导体集成电路装置,半导体集成电路装置的制造方法以及具有记录的自动设计程序的记录介质

摘要

PROBLEM TO BE SOLVED: To provide an automatic design method with which the terminal layout of slanted wirings is efficiently performed with a little computational quantity. SOLUTION: This automatic design method for wiring pattern is provided with a step for generating horizontal wirings 11 having an arbitrary line width, a step for generating slanted wirings 13, which have an arbitrary line width, are extended obliquely at 45 deg. to the horizontal wirings and overlap the terminal parts of horizontal wirings, and a step for setting connecting patterns 15A for connecting horizontal wirings and slanted wirings at the intersections of a centerline in the lengthwise direction of horizontal wirings and a centerline in the lengthwise direction of slanted wirings at least inside an overlap area, where the terminals of horizontal wirings 11 and the terminals of slanted wirings 13 are overlapped.
机译:解决的问题:提供一种自动设计方法,利用该方法可以以较少的计算量有效地执行倾斜布线的端子布局。解决方案:这种用于布线图案的自动设计方法具有生成具有任意线宽的水平布线11的步骤,生成具有任意线宽的倾斜布线13的步骤,它们以45度倾斜延伸。在水平布线的长度方向上的中心线与倾斜的长度方向的中心线的交点处,设置与水平布线相对且与水平布线的端子部重叠的步骤,以及用于将水平布线和倾斜布线连接的连接图案15A的设置步骤。配线至少在重叠区域内,其中水平配线11的端子和倾斜配线13的端子重叠。

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