首页> 外国专利> AUTOMATIC DESIGN METHOD, MASK SET FOR EXPOSURE, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, PRODUCING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND RECORDING MEDIUM WITH RECORDED AUTOMATIC DESIGN PROGRAM

AUTOMATIC DESIGN METHOD, MASK SET FOR EXPOSURE, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, PRODUCING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND RECORDING MEDIUM WITH RECORDED AUTOMATIC DESIGN PROGRAM

机译:自动设计方法,曝光用掩模组,半导体集成电路装置,半导体集成电路装置的制造方法以及具有记录的自动设计程序的记录介质

摘要

PURPOSE: To provide an automatic design method with which the terminal layout of slanted wirings is efficiently performed with a little computational quantity. CONSTITUTION: This automatic design method for wiring pattern is provided with a step for generating horizontal wirings 11 having an arbitrary line width, a step for generating slanted wirings 13, which have an arbitrary line width, are extended obliquely at 45 to the horizontal wirings and overlap the terminal parts of horizontal wirings, and a step for setting connecting patterns 15A for connecting horizontal wirings and slanted wirings at the intersections of a centerline in the lengthwise direction of horizontal wirings and a centerline in the lengthwise direction of slanted wirings at least inside an overlap area, where the terminals of horizontal wirings 11 and the terminals of slanted wirings 13 are overlapped.
机译:目的:提供一种自动设计方法,利用该方法可以以较少的计算量有效地执行倾斜布线的端子布局。构成:这种用于布线图案的自动设计方法具有以下步骤:生成具有任意线宽的水平布线11;生成生成具有任意线宽的倾斜布线13的步骤,它们以45度倾斜地延伸到水平布线,并且并且,在水平配线的长度方向上的中心线与倾斜配线的长度方向上的中心线的交叉点的至少内侧设置用于连接水平配线和倾斜配线的连接图案15A的步骤,该连接图案15A与水平配线的末端部分重叠。重叠区域,其中水平布线11的端子和倾斜布线13的端子重叠。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号