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MEMBRANE OF RESTRICTED PERMEABILITY AND ITS MANUFACTURING METHOD, CHEMICAL SENSOR ELEMENT, AND METHOD OF MANUFACTURING CHEMICAL SENSOR ELEMENT
MEMBRANE OF RESTRICTED PERMEABILITY AND ITS MANUFACTURING METHOD, CHEMICAL SENSOR ELEMENT, AND METHOD OF MANUFACTURING CHEMICAL SENSOR ELEMENT
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机译:渗透率受限的膜及其制造方法,化学传感器元件和制造化学传感器元件的方法
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摘要
PROBLEM TO BE SOLVED: To provide a membrane of restricted permeability capable of controlling easily permeability of a nonchemical substance, a manufacturing method therefor, a chemical sensor element, and a method of manufacturing the chemical sensor.;SOLUTION: An uneven part 101 is formed in a face faced to a functional membrane 2 in the membrane 1 of restricted permeability, in the chemical sensor element having at least a transducer 4 and the membrane 1.;COPYRIGHT: (C)2001,JPO
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