Chemical sensor element, manufacturing method of chemical sensor element, and chemical sensor

摘要

PROBLEM TO BE SOLVED: To realize a chemical sensor element including a detection material in which the influence of adsorption of water vapor is reduced while maintaining good detection sensitivity with respect to a gas to be detected. SOLUTION: When Q unit and T unit are included in an amount of 50 mol% or more of the whole and the total of Q unit and T unit is 100 mol%, the Q unit is 10 mol% to 80 mol% and the T unit is T unit. A detection material containing a siloxane compound containing 90 mol% to 20 mol% is provided. [Selection diagram] None