A method of manufacturing the same, and method of manufacturing a chemical sensor element and a chemical sensor element and limit permeable membrane

摘要

PROBLEM TO BE SOLVED: To provide a membrane of restricted permeability capable of controlling easily permeability of a nonchemical substance, a manufacturing method therefor, a chemical sensor element, and a method of manufacturing the chemical sensor.;SOLUTION: An uneven part 101 is formed in a face faced to a functional membrane 2 in the membrane 1 of restricted permeability, in the chemical sensor element having at least a transducer 4 and the membrane 1.;COPYRIGHT: (C)2001,JPO