DRYING NOZZLE, DRYING APPARATUS AND WASHING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a drying nozzle to realize a high-efficiency drying apparatus capable of drying an object to be treated sufficiently. ;SOLUTION: In the drying nozzle 1, a drying gas feeding part 2 provided with an air feeding tube 9 for feeding air for drying a base plate 10 by jetting toward a surface of the base plate 10 in a state of the surface wet with liquid 21 and a gas-liquid mixture discharging part 3 for stabilizing a liquid thickness of the liquid adhering to the surface of the base plate 10 before drying and provided with a porous material 19 having a large quantity of perforation and disposed apart from the surface of the base plate 10 at a specified distance for discharging a gas-liquid mixture of air and the liquid from the surface of the base plate 10 are provided side by side in a direction along the surface of the base plate 10.;COPYRIGHT: (C)2001,JPO