METHOD FOR GROWING ARTIFICIAL QUARTZ CRYSTAL AND QUARTZ CRYSTAL PLATE

摘要

PROBLEM TO BE SOLVED: To provide a method for growing an artificial quartz crystal which is capable of easily controlling the growth direction (angle of inclination) from a Z face by making a linear defect density smaller. ;SOLUTION: The seed quartz crystal in the method for growing the artificial quartz crystal for growing the artificial quartz crystal from the seed quartz crystal by a water heat synthesis method consists of a Z' plate 3b formed by inclining a Z plate 3a of which the main surface intersects orthogonally with the Z axis of crystal axes (X, Y and Z) counterclockwise or clockwise to the direction of the Z axis from the Y axis viewed from a+x axis direction at a rotating angle θ. In addition, when the rotating angle θ at which the growth rate ratio M/L of the growth rates L and M (mm/day) of the Z plate and Z' plate attains 1 is defined as the maximum rotating angle Q, the rotating angle θis specified to 0θQ° (where the rotating angle θ precludes 1.5, 2, 5, 8.5°).;COPYRIGHT: (C)2000,JPO