AUGER ELECTRON SPECTRAL APPARATUS AND ANALYTICAL METHOD FOR DEPTH DIRECTION

摘要

PROBLEM TO BE SOLVED: To provide an Auger electron spectral apparatus by which a layer, to be analyzed, existing at the inside of a solid sample can be measured precisely. ;SOLUTION: An electron gun 9 is provided. An ion gun 8 is provided. A means by which an electron beam or an ion beam is focused on the surface of a sample 10 so as to be scanned is provided. A means 25 which detects secondary electrons emitted from the sample 10 is provided. A means by which the signal intensity of the detected secondary electrons is displayed in synchronism with the scanning operation of the focused electron beam or the scanning operation of the focused ion beam is provided. A means 24 by which ions at energy lower than that of the focused ion beam are directed at the sample is provided. A means by which electrons emitted from the surface of the sample by the scanning operation of the electron beam is spectrally diffracted by an energy analyzer is provided.;COPYRIGHT: (C)2000,JPO