COMPOSITON ANALYSIS METHOD IN DEPTH DIRECTION AND AUGER ELECTRON SPECTROSCOPE

摘要

PURPOSE: To enable the depth-directional compositions of plural elements with different concentrations to be analyzed easily in a short time by setting measuring requirements for windows for the plural elements so that the signal strength of each of the elements has appropriate magnitude, and measuring their spectra. ;CONSTITUTION: The surface layer of a sample 10 is sputtered with an ion beam from an ion gun 12, and an electron ray is applied to that part from an electron gun 11 to produce Auger electrons, which are then subjected to energy spectral diffraction 13 to obtain signal strength. Next, windows are set to a range consisting only of a narrow energy range containing the Auger electron peak which is desired to be measured, and the detection sensitivies of an analyzer 13 for the individual windows are separately set by an analyzer controller 21 for the measurement of signal strength. As ion sputtering and spectrum measurement are alternately repeated under control of a CPU18, the compositions in the dopth direction of plural elements which greatly differ in concentration can be analyzed in a single operation, resulting in reduced measuring time.;COPYRIGHT: (C)1996,JPO