METHOD FOR ANALYSIS USING AUGER ELECTRON SPECTROSCOPE

摘要

AES analysis method according to the invention the elastic peak, measured after adjusting the Z-axis of the sample, (elastic peak) of the secondary electron intensity (intensity) value and the actual measurement of the secondary electron intensity (intensity) is obtained by using the ratio of the normalized value (normalization) is the intensity (intensity) of the sample through the comparison value is characterized in that the quantitative analysis. ; and the normalized intensity (intensity) value is calculated by the equation below, ; In = C Ir / Iz ; Here, In the standardization (normalization) the intensity (intensity) value, Iz is the second Z-axis intensity (intensity) value of the electron in the elastic peak (elastic peak) after adjustment, Ir is the actual measured the second intensity (intensity) values of E and C is characterized by indicating an arbitrary constant. ; According to the present invention, the size of the normalized peak acoustic (elastic peak) through the Z-axis adjustment (normalization) enhances the ability of the quantitative analysis by AES. Also, by giving the potential to greatly increase the repeatability of the data according to the AES quantitative analysis can be carried out surface analysis of AES equipment with a higher reliability.