QUANTITATIVE ANALYTICAL METHOD FOR COMPOSITION RATIO BY WEIGHT OF ELEMENT IN DEPTH DIRECTION OF METALLIC MATERIAL IN GLOW DISCHARGE LIGHT EMITTING SPECTRAL ANALYTICAL METHOD

摘要

PURPOSE: To obtain the composition ratio by weight of an element in the depth direction of material with high accuracy by making use of an emission yield obtained in advance, and thereby correcting the emission yield in response to the different light emitting characteristics of material every time when measurement is made. CONSTITUTION: The light emitting yield of each element is obtained in advance using a standard specimen by a formula Rn =In /Vn xCn (where In represents the light emitting intensity of each element, Cn represents the weight ratio of material composition, and Vm represents mass sputtering speed). When the composition ratio by weight of each element in the depth direction is quantitatively analyzed using the yield Rn , if there exists any difference in speed Vm between when the yield Rn is determined and when an actual measurement is made, no accurate result can thereby be obtained. Therefore, dr/da is multiplied to the yield Rn in such a way that the depth da of a sputtering dent which is quantitatively analyzed using the yield Rn , coincides with the depth of a dent actually formed in the materials so that a corrected light emitting yield R'n is thereby obtained. And quantitative analysis is then performed again based on the measured intensity In using the yield R'n . By this constitution, an accurate quantitative analysis can thereby be performed even if the standard material is different in light emitting characteristics from the material of the specimen.