In the glow discharge analytical instrument which does the component analysis of depth direction

摘要

PROBLEM TO BE SOLVED: To provide a glow discharge analysis apparatus having a function for displaying analysis results for indicating a separated state of layers of a sample and a component ratio of each layer grasped instantly, and an analysis result display method of the glow discharge analysis apparatus.;SOLUTION: The glow discharge analysis apparatus 1 analyzes components in a depth direction of the sample S by sputtering to a surface of the sample S using a glow discharge, and has a display 35 for displaying a depth component ratio graph 36 for indicating so as to correspond an average of the component ratio of each layer classified by the component ratio of each region of the sample to a location in the depth direction.;COPYRIGHT: (C)2004,JPO