SUBSTRATE FOR LIQUID DISCHARGE HEAD, LIQUID DISCHARGE HEAD, HEAD CARTRIDGE, LIQUID DISCHARGE APPARATUS WITH THE LIQUID DISCHARGE HEAD, RECORDING HEAD, METHOD FOR DRIVING THE LIQUID DISCHARGE HEAD, AND MANUFACTURE OF THE LIQUID DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To provide a liquid discharge head or the like which can sufficiently remove current noises and can reduce costs. ;SOLUTION: The substrate for liquid discharge head is used for a liquid discharge head for discharging liquid by applying a discharge energy to the liquid. The substrate has a semiconductor substrate with an energy conversion element for converting an electric energy to the discharge energy. The semiconductor substrate has a function element set as a capacitor to cope with source noises. The function element includes at least a first barrier layer 33, a ferroelectric material film 32 and a second barrier layer 33 sequentially layered. Each barrier layer 33 is comprised of a film including a cavitation film member set to protect the substrate constituting the liquid discharge head.;COPYRIGHT: (C)2001,JPO