LIQUID DISCHARGE HEAD, RECORDING DEVICE, MANUFACTURING METHOD OF LIQUID DISCHARGE HEAD, SUBSTRATE FOR LIQUID DISCHARGE HEAD AND MANUFACTURING METHOD OF SUBSTRATE FOR LIQUID DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To provide a liquid discharge head capable of improving thermal stress resistance of an energy generating element.;SOLUTION: The liquid discharge head has: a member 4 in which a discharge port 41 for discharging a liquid is formed; and a substrate 3 to which the member 4 is bonded. The substrate 3 has: a heat storage layer 31 including a silicon compound; and an energy generating element 32a provided in a position facing the discharge port 41 and discharging the liquid from the discharge port 41 by generating heat by electric conduction. The energy generating element 32a has a laminate 321 having a metal layer 321a composed of tantalum or tungsten, an Si layer 321b laminated on the metal layer 321a and composed of silicon and an N layer 321c laminated on the Si layer 321b and composed of nitrogen. The metal layer 321a is in contact with the heat storage layer 31.;COPYRIGHT: (C)2014,JPO&INPIT