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Liquid discharge head, recording device, a method of manufacturing a liquid discharge head, a substrate for a liquid discharge head, and a method of manufacturing a substrate for a liquid discharge head
Liquid discharge head, recording device, a method of manufacturing a liquid discharge head, a substrate for a liquid discharge head, and a method of manufacturing a substrate for a liquid discharge head
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机译:液体排出头,记录装置,液体排出头的制造方法,液体排出头的基板以及液体排出头的基板的制造方法
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摘要
The invention provides a liquid ejection head including a member in which an ejection orifice for ejecting a liquid is formed, and a substrate to which the member is joined. The substrate has a heat storage layer containing a silicon compound and an energy-generating element provided at a position corresponding to the ejection orifice for generating heat by electrification to eject the liquid from the ejection orifice. The energy-generating element has a laminate having a metal layer formed of tantalum or tungsten, an Si layer laminated on the metal layer and formed of silicon and an N layer laminated on the Si layer and formed of nitrogen, and the metal layer is in contact with the heat storage layer.
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