Multi wafer introduction/single wafer conveyor mode processing system and methodof processing wafers using the same

摘要

High throughput and low capital equipment costs can be achieved by increasing process rates was well as increasing the number of deposition clusters in a current cluster system. Increases in throughput can be achieved by multi-wafer entry mode wherein a stack of multiple wafers is introduced to a processing chamber via a transfer chamber. Thus, no gate valves are required for each deposition stage and a conveyor transports the individual wafer from deposition stage to deposition stage thereby increasing throughput. The elimination of gate valves, pumps, control electronics and other miscellaneous parts will also reduce the cost of the equipment.