MEASURING STATION FOR INTEGRATED CIRCUITS ON WAFERS OR OTHER ELECTRONIC COMPONENTS AND KITS FOR ASSEMBLY OF SAID MEASURING STATIONS

摘要

The invention relates to a measuring station for integrated circuits on wafers, or other electronic components, comprising the following: a positionable mounting device (26) for retaining a wafer or another electronic component; at least one probe manipulator (36), for holding and positioning a measuring probe; a screened housing, which fully encloses the mounting device (26) and the at least one probe manipulator (36), including the measuring probe, whereby said screened housing forms part of the machine frame of the measuring station, with a lower housing chamber (machine chamber), which includes the positioning gear for the mounting device (26) and the control and supply electronics of the measuring station. The invention further comprises one or several housing chambers (measuring chambers), which enclose the mounting device (26) and at least one of the probe manipulators.