Measuring system has supply station and inspection station for examining article, particularly wafer, where supply station and inspection station are separated from each other

摘要

The measuring system (10) has a supply station (11) and an inspection station (16) for examining an article, particularly a wafer (12), where the supply station and the inspection station are separated from each other. An interface (20) is arranged between the supply station and the inspection station in lockable manner. The interface has a large opening, so that a transportation arm with the wafer reaches through the opening within small tolerances.