首页> 外文会议>Conference on Optical Modeling and System Alignment >Novel active alignment technique for measuring tilt errors in aspheric surfaces during optical assembly using Lens Alignment Station (LAS)
【24h】

Novel active alignment technique for measuring tilt errors in aspheric surfaces during optical assembly using Lens Alignment Station (LAS)

机译:使用透镜对齐站(LAS)在光学组件期间测量非球面倾斜误差的新型主动对准技术

获取原文

摘要

As optical designs require increasingly more aspheric elements to achieve high-resolution, high-quality imaging fromsmaller, more cost-effective systems, active alignment solutions to center and de-tilt aspheres in-situ during assembly arebecoming paramount. Traditional active alignment systems, i.e. autocollimators, determine lens orientation from center ofcurvature (CC) positions of each surface and are consequently limited when measuring aspheres. Such tools measure theparaxial CC; therefore, measurement is inherently blind to orientation of the aspheric edge, leading to centered yet tiltedaspheric surfaces and, thus, degraded image quality from the final optical assembly.Current market solutions to measure aspheric tilt consist of external probes directly measuring the aspheric edge; however,this approach involves addition and alignment of multiple precision stages and secondary sensors, adding to the complexityand cost of alignment systems.This paper demonstrates a novel solution for accurately measuring aspheric tilt during the assembly process utilizing theexisting capabilities of the Lens Alignment Station (LAS). The LAS is an active alignment tool whose specialized designextends measurement ability beyond the requirement of confocal reflection. Aspheric measurement begins with standardvertex centration using the LAS at confocal position, but for tilt, we image away from confocal position and flood thesurface with a high NA objective sampling the aspheric edge. Beyond confocal reflection, the LAS detects retroreflectedconcentric fringes that trace an orbit as a tilted asphere rotates. The orbit radius is proportional to tilt magnitude, such thatsimple software calculations accurately yield aspheric tilt measurements without requiring expensive external hardware.
机译:由于光学设计需要越来越多的非球面元素来实现高分辨率,高质量的成像更小,更具成本效益的系统,在组装期间,在原位原位的中央和脱色的角度的主动对准解决方案变得最重要的。传统的主动对准系统,即自动调用器,从中心确定镜头取向每种表面的曲率(Cc)位置,因此在测量非球面时受到限制。这些工具测量剖腹产;因此,测量本质上与非球面边缘的方向视而不见,导致居中倾斜非球面表面和从最终光学组件的图像质量降低。目前的市场解决方案来测量非球面倾斜的外部探针,直接测量非球面边缘;然而,这种方法涉及多个精密阶段和辅助传感器的加法和对齐,增加了复杂性和对准系统的成本。本文演示了一种新的解决方案,用于在装配过程中准确测量非球面倾斜的解决方案透镜对齐站(LAS)的现有能力。 LAS是一个主动对齐工具,其专门设计扩展了超出了共聚焦反射要求的测量能力。非球面测量以标准开头顶点厘定使用加焦位置的LAS,但对于倾斜,我们认为远离共聚焦位置并泛滥表面具有高NA目标采样非球面边缘。超越共聚焦反射,LAS检测到逆流追踪轨道作为倾斜的间谍旋转的同心条纹。轨道半径与倾斜幅度成比例,使得简单的软件计算精确地培养了非球面倾斜测量,而无需昂贵的外部硬件。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号