ALIGNER EXPOSURE METHOD METHOD OF PRESSURE ADJUSTMENT OF PROJECTION OPTICAL SYSTEM AND METHOD OF ASSEMBLING ALIGNER

摘要

The exposure light from the exposure light source 100 via the illumination optical system 200 lighting on the reticle R, and an image of the pattern in the projection optical system 300 in the exposure apparatus for projecting on the photosensitive substrate W, a projection optical system (300) a space formed between the optical elements in the lens barrel LB to accommodate the gas supply device 150 for charging the inert gas (310, 311), a pressure detector for detecting the pressure in the space PS2, PS3 and detected by the pressure detector PS2, PS3 and a performance optical control device (303, 304) for controlling the optical performance of the projection optical system 300 according to the pressure. Optical performance regulating device is a device for adjusting the device, or, the pressure space between the optical element for adjusting the distance between the pair of optical elements.