PURPOSE: A 6 DOF(degree of freedom) parallel mechanism is provided to perform translational motion of a moving platform and rotation by a linear actuator for precise position control, and to apply to accurate work for multiple motion widely. CONSTITUTION: A 6 DOF parallel mechanism is composed of a moving plate placed in the upper part; a base platform(20) placed in the lower part; an external link(30) connecting the moving plate and the base plate; and an internal link(50) connecting the moving plate and the base plate by a multilink spherical joint(40). The tetrahedron structure is formed with connecting plural internal links around the multilink spherical joint. The moving plate is rotated with driving three external links in fixing three internal links connected to the multilink spherical joint. The parallel mechanism operates translational motion of the moving plate separated from rotation in a small space. A linear actuator as the internal link and the external link controls position finely, and operates accurately and finely.
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