PURPOSE: A spin scrubber having an indexer part on which a stage with a cassette loaded thereon is installed is provided to prevent a cassette from being unloaded from a stage of an indexer part when a process is not finished. CONSTITUTION: After a cassette(50) is loaded on a stage of an indexer part, when a process is being performed on a spin scrubber, the cassette(50) is prevented from being unloaded from the stage. When the process is finished on the spin scrubber, the cassette(50) can be unloaded and be free from the stage(22). For this, a locking unit is installed on the indexer part to fix the cassette(50) on the stage(22). When the process is finished on the spin scrubber, a control unit separates the locking unit from the cassette(50). The control unit may be a control part of the spin scrubber or a separate control part. The locking unit has a flag(54) and an actuator(52). The flag(54) is a plate which is arranged in parallel to the stage(22). The actuator(52) upwardly and downwardly moves the flag(54) and connected to the flag to rotate the flag. The actuator(53) includes a motor and a cylinder.
展开▼
