Heatsink and semiconductor laser device and semiconductor laser stack using heatsink

摘要

The semiconductor laser stacking apparatus 1 includes three semiconductor lasers 2a to 3c, two copper plates 3a and 3b, two lid plates 4a and 4b, a supply pipe 5, a discharge pipe 6, Insulating members 7a to 7d, and three heat sinks 10a to 10c. The heat sinks 10a to 10c include a lower flat plate member 12 having a supply channel recess 22 formed on its upper surface, an intermediate flat plate member 14 having a plurality of diaphragm holes 38 formed therein, And an upper flat plate member 16 on which the channel groove 30 is formed are sequentially laminated, and the contact surfaces are joined together.