Planar typed arc ion plating apparatus using cathodic arc discharge

摘要

PURPOSE: A large area flat coating apparatus is provided to enable uniform large area coating by using a neodymium-based permanent magnet as a flat arc coating source. CONSTITUTION: A flat coating apparatus using arc sputtering includes a cathode(12), a Teflon insulator unit(14), a cooling unit(16), an auxiliary anode(17), a shielding member(18), and a movable permanent magnet unit(20). The cathode(12) is made of at least one element selected from a group consisting of Ti, Cr, Al, WC, Zr and the like which are evaporated in generation of arc. The Teflon insulator unit(14) surrounds the outer periphery of the cathode(12) to fix the same and insulates the cathode(12) from an adjacent conductor. The cooling unit(16) directly cools the cathode(12) heated by arc. The auxiliary anode(17) stabilizes arc generated in the upper part of the cathode(12). The shielding member(18) prevents damage of the insulator unit(14) and a vacuum chamber from arc. The movable permanent magnet unit(20) restricts arc within the surface of the cathode(12) and guides arc to diffuse on the whole surface of the cathode(12).