Planar typed arc ion plating apparatus using cathodic arc discharge

摘要

The present invention discloses a negative electrode arc coating apparatus for uniformly generating an arc in a flat cathode by using a magnetic field generated by a permanent magnet mounted behind a negative electrode target to enable uniform coating on a large area. The negative electrode arc coating apparatus of the present invention is a target insulating portion for placing and insulating a target, a cooling portion for cooling the target, and a movement path of electrons generated on the target surface, and is generated on an upper portion of the target. An auxiliary anode for stabilizing the arc, a shield for shielding the arc from leaving the target, and a movable portion for limiting the movement of the arc into the surface of the target and guiding it to the front surface over the target surface. It includes a permanent magnet part. The negative electrode arc coating apparatus of the present invention increases the erosion rate of the expensive target through precise control of the magnetic field, uniformly coating a high-functional thin film such as TiN, CrN, AlN, WC by introducing a reactive gas into the chamber.