Acceleration mes on receptor

摘要

PURPOSE: To provide an acceleration sensor with a sensor body constructed by a piezoelectric material and supported in a beam form, the sensor body resistant to shock and easy to handle having a great SN ratio, a wide dynamic range and a small output variation. ;CONSTITUTION: A sensor body 10 is formed with a piezoelectric ceramics 11 and a metal substrate 12 pasted to one side of the piezoelectric ceramics. The thickness ratio T₂/T₁ of the thickness T₂ of the metal substrate 12 to the thickness T₁ of the piezoelectric ceramics 11 is set to be within 0.5-1.3.;COPYRIGHT: (C)1996,JPO