Electrostatic micromotor with large in-plane force and no out-of-plane force

摘要

An electrostatic actuator having two-dimensional in-plane motion of a monolithic element suspended by flexures which is unstable in the open-loop and uses feedback control to operate. By adding a common bias voltage to each of the stator electrodes when the translator and stator are in the unstable equilibrium position, repulsion can be reduced to zero while the in-plane force remains in unstable equilibrium. Stabilizing the in-plane force at the unstable equilibrium position is achieved by shifting the electrical phase of the stator potential distribution in a direction to produce an in-plane force which opposes motion of the translators away from the equilibrium position. Linear control and pulse width modulation control permit altering the phase by less than the stator pitch. The drive electrodes of the translator and stator are used as position sensors for in-plane and out-of-plane relative displacements of the translator and stator concurrent with operation of the motor using either pulse-width modulation or linear control.