Method for establishing shallow junction in semiconductor device to minimize junction capacitance

摘要

A method for making a semiconductor device including a silicon substrate includes implanting Nitrogen into the substrate after gate stack formation and before source/drain pant implantation. The Nitrogen is implanted and then annealed as appropriate to establish shallow junction regions and minimal overlap regions in the substrate. Then, the source/drain dopant is implanted and activated, with the dopant essentially being constrained by the Nitrogen to remain concentrated in the shallow junction and minimal overlap regions, thereby minimizing junction capacitance and overlap capacitance in the finished device and consequently improving the speed of operation of the device.