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Planar thin film head and method for forming a gap of a planar thin film magnetic head
Planar thin film head and method for forming a gap of a planar thin film magnetic head
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机译:平面薄膜磁头和形成平面薄膜磁头的间隙的方法
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摘要
A method for forming a gap of a planar thin film magnetic head and a planar thin film magnetic head formed thereby, includes a photoresist having a stepped surface is formed at one side from the center of a gap spacer pedestal. Also, a gap spacer of a diamond-like carbon material for forming the gap is formed at a side well of the photoresist, and one side of an upper pole piece is formed with a magnetic material over the other side from the center of the gap spacer pedestal. Further, the photoresist is etched and the other side of the upper pole piece is formed with a magnetic material over the exposed gap spacer pedestal.
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