Method and apparatus to minimize the white point defects of the quartz glass crucible

摘要

(57) white defect is caused by the silica particles to fall off from the electrode for generating a plasma arc or used in the summary] crucible manufacturing process. Silica particles are formed by the silica vapor to condense a part of the electrode. The present invention prevents the coagulation of silica particles in the electrode by applying a non-reactive gas to the condensation part of the electrode is likely to occur.