首页> 外国专利> Wavenumber domain reflectometer and method and apparatus for interference confocal microscope that uses a compensation and reduction of background amplitude

Wavenumber domain reflectometer and method and apparatus for interference confocal microscope that uses a compensation and reduction of background amplitude

机译:用于补偿和降低背景振幅的干涉共焦显微镜的波数域反射仪及方法和装置

摘要

(57) [summary] in-focus image of a region of the subject on, by broadband point source from (90) the reference beam probe beam and (P22B) to (R22B) or generated SOLUTION means of interest (112) and in are identified from out-of-focus image so as to reduce the error of the image information of the target. In this case, it is possible to convert the beam to generate the antisymmetric spatial properties reference beam (R32B), and focused to a line of the region of the probe beam to generate a probe beam in-focus return return the focal case probe beam (P32B I want to generate the anti-symmetric space characteristics). Next, the probe beam is passed through a dispersive element for focusing thereto (P42A) to the line of the detector plane (P42A), a detector system (114) is spatially filtered in-focus return. The reference beam is passed through the dispersive element for focusing thereto (R42A) (R42A), the line of the detector plane is spatially filtered. Is passed (P62A), the dispersive element (P62C) beam from the out-of-focus image point is spatial filter processing. It is spatial filter processing in the detector plane, the reference beam that is spatially filtered by the detector plane (R42C) is interference probe beam and (P42C) in-focus return and (P62C) beam from the out-of-focus image point that. Are spatially filtering in the detector plane, amplitude probe beam (P42C) is the detector as interference term between the probe beam and the reference beam (P42C) of (R42C) in-focus return in-focus return that has been spatial filter processing it is detected by the (114) system. Spatially filtering the detector plane whereby the amplitude of the interference term between the amplitudes reference beam (R42C) out-of-focus image beam and (P62C) is substantially reduced, detection for representing image information of the target I reduces the error of the data generated by the (114) vessel system.
机译:(57)通过(90)参考光束探查光束和(P22B)至(R22B)的宽带点源或所产生的感兴趣的SOLUTION装置(112)拍摄的对象区域的摘要图像。从散焦图像中识别出图像,以减少目标图像信息的误差。在这种情况下,可以转换光束以生成反对称空间特性参考光束(R32B),并将其聚焦到探测光束区域的一条线上以生成探测光束聚焦返回返回焦点盒探测光束(我要生成P32B反对称空间特征)。接着,使探测光束通过色散元件以将其聚焦(P42A)至检测器平面(P42A)的线,对检测器系统(114)进行空间滤波后的聚焦返回。使参考光束通过色散元件以对其聚焦(R42A)(R42A),对探测器平面的线进行空间滤波。通过(P62A)时,来自离焦像点的色散元件(P62C)光束将进行空间滤波处理。它是探测器平面中的空间滤波处理,被探测器平面(R42C)在空间上滤波的参考光束是干涉探测器光束和(P42C)聚焦返回的光束,以及(P62C)光束从离焦像点发出的光束那。在探测器平面上进行空间滤波时,振幅探测光束(P42C)作为探测器光束与(R42C)聚焦返回的聚焦返回中的参考光束(P42C)之间的干扰项,已经对其进行了空间滤波处理(114)系统检测到。在空间上对检测器平面进行滤波,从而大幅降低幅度参考光束(R42C)离焦图像光束和(P62C)之间的干涉项的幅度,用于表示目标I图像信息的检测减少了数据误差(114)船只系统生成的。

著录项

  • 公开/公告号JP2002517710A

    专利类型

  • 公开/公告日2002-06-18

    原文格式PDF

  • 申请/专利号JP20000552462

  • 发明设计人 ヒルヘンリー・エイ;

    申请日1999-05-26

  • 分类号G01B11/00;G01B9/02;G01J3/51;G01N21/17;G01N21/27;G02B21/00;G03F9/00;G11B7/0065;H01L21/027;

  • 国家 JP

  • 入库时间 2022-08-22 01:01:58

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